Low Energy Ion Scattering Spectroscopy (LEIS/ISS)


A highly surface sensitive spectroscopy which compliments the chemical and quantitative analysis offered by XPS.


Ion Scattering Spectroscopy (also known as ISS or LEIS) is a technique whereby a monoenergetic beam of He+ or Ar+ ions are scattered by the atoms in a surface.

The loss of kinetic energy due to scattering caused by the mass difference between ion and scattering atom is measured and a spectrum is produced.  Clearly two atoms in a surface which have very different masses (for example, oxygen and iron) will scatter ions differently.


Unparalleled Surface Detection

Enables detection of top-most surface elements.

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Surface Coverages

A powerful tool for determination of the relative surface coverage of a given element.

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What's on a Surface

Study adsorption on single crystal materials.

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Ultrathin Layers

Provides an indication of monolayer surface coverage (e.g. by a self-assembled monolayer).

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How Do We Grow?

Study growth of ultra-thin layers such as those produced by atomic layer deposition (ALD).

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Systems at Harwell (all), Cardiff (Ultra) and UCL (Theta Probe) are equipped with ISS.

Choice of gases

While default set up is He+, capabilities for heavier gases are available if required

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Choice of energy

Either 1 keV or 3 keV sources available for separation of light of heavier elements

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Beam raster

Prevent potential surface damage by using a beam raster

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Sample pelletisation available

Need to analyse a powder sample? Pellet presses are available at the Research Complex.

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